Investigation of structural and luminescence properties of Nd-doped ZnO thin film and TM(Fe,Mn)-doped ZnO thin films

The un-doped ZnO thin film and metal co-doped ZnO(ZnO dopetron sputtering.The films were analyzed by XRD and AFM,the results indicate that the un-doped ZnO thin films were apt to grow in c-axis orientation,but the co-doped ZnO thin films were nano-multi-crystal which deviate from its normal growth direction.Besides,the thin films were also studied by the AFM,it was found that owing to the doped process the surfaces were rough.The PL spectrum indicated that the thin films have strong purple peak at 395 nm and weak green peak at 495 nm.The PL spectrum peak intensity of co-doped ZnO thin films were also changed.The results showed that the peak of Nd-doped ZnO thin films were weakened but the Nd and other transition-metal(Fe and Mn)co-doped ZnO thin films were strengthened,in the last it is given the causes of PL peak intensity change.