Study on the preparation of ITO ceramic target with high density

The indium tin oxide(ITO) ceramic target with high relative density was prepared by cold iso-static pressing and sinter at air atmosphere process,using the mono-dispersed ITO powders with two different particle size(708)nm and(406)nm which synthesized by resin-hydrothermal as raw materials.The factors among the particle size-distribution,pressure and sintering temperature etc which affected the density of ITO ceramic targethave been investigated.The ITO ceramic target could have get a relative density about 99.28% by means of which are mixed powder with 7:3 weight ratio and molded under 250MPa of CIP pressure and then sintered at the temperature of 1300℃ for 1.5 h and 1400℃ for 1 h.