吴永汉, 李艳峰, 吴兴惠. TPP-1型椭偏谱仪测膜厚的探讨[J]. 云南大学学报(自然科学版), 2003, 25(6): 515-517.
引用本文: 吴永汉, 李艳峰, 吴兴惠. TPP-1型椭偏谱仪测膜厚的探讨[J]. 云南大学学报(自然科学版), 2003, 25(6): 515-517.
WU Yong-han, LI Yan-feng, WU Xing-hui. Investigation on the type of TPP-1 the ellipsometer for measuring the thickness of thin films[J]. Journal of Yunnan University: Natural Sciences Edition, 2003, 25(6): 515-517.
Citation: WU Yong-han, LI Yan-feng, WU Xing-hui. Investigation on the type of TPP-1 the ellipsometer for measuring the thickness of thin films[J]. Journal of Yunnan University: Natural Sciences Edition, 2003, 25(6): 515-517.

TPP-1型椭偏谱仪测膜厚的探讨

Investigation on the type of TPP-1 the ellipsometer for measuring the thickness of thin films

  • 摘要: 说明原椭偏谱仪不能直接测量膜厚,提出外加波长片后可以测量膜厚的2种方法.

     

    Abstract: It is shown that the conventional ellipsometer can not be used to measuring the films’thickness.To solve this problem,it is suggested thst two kinds of methods for measuring the thickness of thin films by addition of filter wavelength leaf.

     

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